DZS-500 Electron Beam and Resistance Evaporation and Film Plating System

DZS-500 Electron Beam and Resistance Evaporation and Film Plating System

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Code: DZS-500

Used for preparing electroconductive thin film, semiconductor thin film, ferroelectric thin film and optical thin film for universities, science institutions to research and small-lot production.

STRUCTURE
Vacuum evaporation chamber, E-type beam gun, thermal evapo­ration electrode, substrate heating turntable, gas circuit, pumping system, vacuum measurement system, electrical control system and mounting base.

SPECIFICATION
Specification Table

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